Structural and Electrical Characterization of Isotactic PMMA Thin Films Deposited by Spin Coating

摘要

Thin PMMA films have been studied extensively for their potential applications as membranes, microlithography and optical applications. PMMA has been recently use like gate dielectric film in OTFT. in this paper we present the structural and electrical characteristics of isotactic PMMA (i-PMMA) thin films prepared by spin coating depositions. The electrical characterization was done using a simple capacitive structure to observe current density across dielectric film and voltage breakdown. The i-PMMA films possess low current density across dielectric (1 x 10(-8) A/cm(2)) and the breakdown voltage is higher than 100 V.