Modeling and Simulation of the Ferroelectric Based Micro Gyroscope: FEM Analysis

摘要

This paper presents the design and modeling of micro-electromechanical systems (MEMS) on the ternary ferroelectric compounds (PZT) based by using finite element model (FEM) simulation. The conceptual framework establishes five steps to perform the critical analysis: design a novel structure, define the failure mechanisms under the given conditions, analyze different.vibrations, analyze the operation principle, and de tect resonance modes. In addition, MEMS failure modes were analyzed under different scenarios and the obtained results discussed.