Auger Analysys of PbTiO_3 Films Prepared by Reactive Electron Beam Coevaporation

摘要

Auger electron spectroscopy was applied to studydepth profiles of PbTiO_3 thin films which were prepared bycoevaporation with high deposition rate of 50nm/min and withsubstrate temperature of 550 deg C. When the films weredeposited on sputtered Pt films, Pb was concentrated on the Ptsurface and PbPt_x was formed. On the contrary, a perovskitephase of PbTiO_3 was obtained without post thermal annealing ona sputtered 1 percent Te-added indium tin oxide (S-ITO) substrate.Chemical composition of the film on S-ITO was not dependent ondepth excepting surface region.