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Organic semiconductor distributed feedback laser pixels for lab-on-a-chip applications fabricated by laser-assisted replication

机译:通过激光辅助复制制造的用于芯片实验室应用的有机半导体分布式反馈激光像素

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The integration of organic semiconductor distributed feedback (DFB) laser sources into all-polymer chips is promising for biomedical or chemical analysis. However, the fabrication of DFB corrugations is often expensive and time-consuming. Here, we apply the method of laser-assisted replication using a near-infrared diode laser beam to efficiently fabricate inexpensive poly(methyl methacrylate) (PMMA) chips with spatially localized organic DFB laser pixels. This time-saving fabrication process enables a pre-defined positioning of nanoscale corrugations on the chip and a simultaneous generation of nanoscale gratings for organic edge-emitting laser pixels next to microscale waveguide structures. A single chip of size 30 mm x 30 mm can be processed within 5 min. Laser-assisted replication allows for the subsequent addition of further nanostructures without a negative impact on the existing photonic components. The minimum replication area can be defined as being as small as the diode laser beam focus spot size. To complete the fabrication process, we encapsulate the chip in PMMA using laser transmission welding.
机译:将有机半导体分布式反馈(DFB)激光源集成到全聚合物芯片中,有望用于生物医学或化学分析。然而,DFB波纹的制造通常是昂贵且费时的。在这里,我们应用近红外二极管激光束进行激光辅助复制的方法,以有效地制造具有空间定位的有机DFB激光像素的廉价聚甲基丙烯酸甲酯(PMMA)芯片。这种省时的制造工艺可以在芯片上进行预先确定的纳米级波纹定位,并可以同时生成纳米级光栅,用于紧邻微尺度波导结构的有机边缘发射激光像素。可以在5分钟内处理尺寸为30 mm x 30 mm的单个芯片。激光辅助复制允许随后添加更多的纳米结构,而不会对现有的光子组件产生负面影响。最小复制面积可以定义为与二极管激光束焦点的尺寸一样小。为了完成制造过程,我们使用激光透射焊接将芯片封装在PMMA中。

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