DISTRIBUTED FEEDBACK LASER, SEMICONDUCTOR OPTICAL DEVICE AND METHOD FOR FABRICATING DISTRIBUTED FEEDBACK LASER

摘要

PROBLEM TO BE SOLVED: To provide a distributed feedback laser, a semiconductor optical device, and a method for fabricating a distributed feedback laser in which the fabrication yield can be enhanced by suppressing variation in the optical coupling coefficient caused by variation of fabrication.;SOLUTION: The distributed feedback laser comprises clad layers provided on an InP substrate 1 on the opposite sides of an active layer 4, a diffraction grating 6 formed in any one clad layer with a refractive index different from that of the clad layer and having a frame-like grating extending in a direction intersecting the exiting direction of light at a specified pitch in that direction, and at least one light distribution regulation layer 2 formed in the clad layer while spaced apart from the diffraction grating and having a composition similar to that of the diffraction grating.;COPYRIGHT: (C)2003,JPO