For vacuum measurement within applications pumped by rotary vane pumps, the new VSP 3000 has a chemical and mechanical robustness which is unequalled by conventional Pirani sensors. Thanks to its ceramic protective covering of the metal wire and a splash-watertight plastic housing the sensor is an extremely reliable fine vacuum gauge, which is easy to use and offers high life expectancy. The application includes measurement of fine to rough vacuum as well as regulation within this range. Many lab applications like residual drying, lyophilization or short-path distillation need ultimate vacuum and measurement in the fine vacuum range (from 0.001 to 1 mbar) where, for example, rotary vane pumps and Pirani gauges are combined. In particular, vacuum processes with chemically aggressive gases and vapors typically lead to corrosion of the Pirani filaments and to a build up of deposits on their surface from the oil vapors coming from the rotary vane pump and process products. As a consequence of this corrosion and deposit build up the measurement becomes inaccurate. It can even lead to a complete failure of the sensor.
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