Determination of the Rate Constants for Bimolecular Reactions of O(~3P) Atom with SiH_4 and SiHCl_3

Jee-Yon Lee; Hee-Soo Yoo; Jin Seog Kim

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Determination of the Rate Constants for Bimolecular Reactions of O(~3P) Atom with SiH_4 and SiHCl_3

机译：O（〜3P）原子与SiH_4和SiHCl_3双分子反应的速率常数的确定

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摘要

The reaction of silanes with oxygen atom is very important because of the roles in semiconductor fabrication such as chemical vapor deposition (CVD) processes,as well as in the study of unstable nature under oxygen atmosphere including combustion and explosion processes.

机译：硅烷与氧原子的反应非常重要，因为它在诸如化学气相沉积（CVD）工艺之类的半导体制造过程中，以及在氧气氛下（包括燃烧和爆炸过程）不稳定性质的研究中发挥着重要作用。

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来源
《Bulletin of the Korean Chemical Society》 |2007年第8期|共3页
作者
Jee-Yon Lee; Hee-Soo Yoo; Jin Seog Kim;
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原文格式 PDF
正文语种 eng
中图分类化学工业;
关键词
SiH4; SiHGl3; O(~3P); Chemiluminescence imaging; Rate constant;

机译：SiH4;SiHGl3;O（〜3P）;化学发光成像;速率常数;

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1. Determination of the Rate Constants for Bimolecular Reactions of O(~3P) Atom with SiH_4 and SiHCl_3 [J] . Jee-Yon Lee, Hee-Soo Yoo, Jin Seog Kim Bulletin of the Korean Chemical Society . 2007,第8期

机译：O（〜3P）原子与SiH_4和SiHCl_3双分子反应的速率常数的确定
2. Determination of the Rate Constants for Bimolecular Reactions of O(³P) Atom with SiH₄ and SiHCl₃ [J] . Hee-Soo Yoo, Jee-Yon Lee, Jin Seog Kim Bulletin of the Korean Chemical Society . 2007,第8期

机译：O（^{3 P）原子与SiH _{4 和SiHCl _{3 的双分子反应速率常数的确定}}}
3. Rate constant calculations for atom-diatom reactions involving an open shell atom and a molecule in a п electronic state: Application to the C(~3P) + NO(X~2п) reaction [J] . A. Beghin, T. Stoecklin, J. C. Rayez Chemical Physics: A Journal Devoted to Experimental and Theoretical Research Involving Problems of Both a Chemical and Physical Nature . 1995,第1a3期

机译：涉及开壳原子和处于π电子状态的分子的原子-硅藻反应的速率常数计算：在C（〜3P）+ NO（X〜2п）反应中的应用
4. Long-Range Interaction Potential of Open Shell Atoms with Neutral Molecules: Application to the Calculation of the Rate Constant for the C_2H(~2Σ~+)+O(~3P) Reaction [C] . Yuri Georgievskii, Stephen J. Klippenstein International Astronomical Union . 2011

机译：具有中性分子的开壳原子的远程相互作用电位：应用于C_2H（〜2σ〜+）+ O（〜3P）反应的速率常数计算
5. Experimental and theoretical determination of the temperature dependent rate constant for the reaction of hydroxyl radicals with some volatile organic compounds. [D] . Carey, Paul E., Jr. 2015

机译：羟基自由基与某些挥发性有机化合物反应的温度相关速率常数的实验和理论确定。
6. Partial reactions of the NaK-ATPase: determination of rate constants [O] . 1994

机译：NaK-ATPase的部分反应：速率常数的确定
7. Determination of the Rate Constants for Bimolecular Reactions of O(3P) Atom with SiH4and SiHCl3 [O] . 2007

机译：用siH4和siHCl3测定O（3p）原子双分子反应的速率常数
8. A CALCULATION ON THE EFFECT OF NONHOMOGENEITY ON THE DETERMINATION OF THE RATE CONSTANT OF A BIMOLECULAR,SECOND-ORDER REACTION, [R] . sauer, myran c. jr 1967

机译：非均匀性对测定双分子二阶反应速率常数的影响的计算，

Determination of the Rate Constants for Bimolecular Reactions of O(~3P) Atom with SiH_4 and SiHCl_3

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