Qualitative Sims Analysis of _(28,29,30)SiIsotope Concentrationin Silicon Using a Tof.Sims-5 Setup

摘要

The possibility of quantitative SIMS determination of ~(28-30)Siisotope concentrations in siliconsamples using a TOE SIMS-5 spectrometer is shown. The isotope composition of a large number of Si sam-ples, namely epitaxial Si layers with a natural isotope ratio, amorphous Si films depleted of 28Si isotope(deposited on natural Si substrates), and samples enriched with 28Si isotope (manufactured by VITCON) isinvestigated. Substantial variations in the ~(29)Si/~(30)Si isotope ratio (from 1.51 for the natural content up to 25 inthe case of limiting enrichment with 28Si isotope) are revealed.