Scanning probe microscopy as a metrology method in micro-and nanostructure investigations

摘要

Evolution of many high technologies such as microelectronics,microsystem technology and nanotechnology involves design,application and testing of technical structures,whose size is being decreased continuously.Scanning probe microscopes (SPM)are therefore increasingly used as diagnostic and measurement instruments.Consequently the demand for standardized calibration routines for this kind of equipment rises.Up to now,there has been no in generally accepted guideline on how to perform SPM calibration procedure.In this article we discuss calibration scheme and focus on several critical aspects of SPM characterization e.g.the determination of the static and dynamic physical properties of the cantilever,the influence factors which need to be considered when plotting a scheme for the calibration of the force and displacement sensitivity.