MEMS-based Universal Fatigue-Test Technique

摘要

We have developed a MEMS (micro electro mechanical systems)-based method for fatigue testing of micrometer- millimeter-sized specimens of any material (hence 'universal'). The miniature, re-usable, stand-alone fatigue test frame is fabricated as a single MEMS chip. Specimens of any material can be manually mounted in the chip and fatigue-tested. We describe the design and construction of the MEMS device and specimens, the test protocol and data analysis procedure, and show stress versus number of cycles to failure (S-N) results for 25 μm thick Al 1145 H19 foil. The S-N results are in accord with expectations, and examination of the fracture surface by scanning electron microscopy shows distinct regions corresponding to slow and fast crack growth.