Effect of process parameters on growth rate and diameter of nano-porous alumina templates

摘要

Anodic aluminium oxide (AAO) template with hexagonal shaped nano-pores with high aspect ratio was fabricated by two-step anodization processes from high purity aluminium foil. It was observed that pore dimensions were affected by anodizing voltage, electrolyte temperature and the duration of anodization time. The vertical growth rate of the pores (10-250 nm/min) was found to vary exponentially with anodizing voltage;;however, it exhibits linear increment with the electrolyte temperature. The measured pore diameter (50-130 nm) shows a linear variation with anodizing voltage. The bottom barrier oxide layer was etched out by pore widening treatment to obtain through holes.