Growth and Characterization of a Porous Aluminum Oxide Film Formed on an Electrically Insulating Support

摘要

Thin films of porous anodic aluminum oxide have been prepared on an electrically insulating support by the anodization of aluminum films sputtered onto glass slides. The resulting transparent aluminum oxide films were characterized by scanning electron microscopy and variable angle ellipsometry. Subsequently, the film was modeled from the ellipsometric data taken. An underlying conductive medium is not necessarily needed to bring about nearly complete anodization of the aluminum layer.