Publisher’s Note: Electrically Benign Dry-Etching Method for Rutile TiO2 Thin-Film Capacitors with Ru Electrodes [Electrochem. Solid-State Lett., 13, G1 (2010)]

摘要

This article was originally published online on October 22, 2009, with Fig. 3 duplicated as Fig. 4 on page G3. ECS apologizes for this error. Figure 4 was corrected on November 13, 2009, and is correct in the printed version of Letters