Influence of Emitted Electrons on the Method for Direct Measurement of Condensate Resistance

摘要

Electrical resistance of the vacuum-deposited condensate has non-linear relation to the condensate film thickness. Therefore, there exists a need for experiments to study applicability of the non-invasive method for condensate resistance measurement and to identify parameters by measuring condensate resistance directly. By using two-point measurement probes, this study analyses the influence of electrons emitted in the process of evaporator electronic emission on the method for direct measurement of condensate resistance.