SEM for the 21st Century - Scanning Ion Microscopy

摘要

The scanning electron microscope (SEM) has become the most widely used of all advanced imaging tools because it offers a unique range of capabilities. It can resolve and image objects with sizes ranging from millimeters to below 1 nm; it offers multiple ways to generate, collect, and display signals; the images produced contain information about the topography, chemical composition, and the magnetic, electrostatic, and crystallographic properties of the sample; and it can generate characteristic x-ray emission from the specimen to provide a quantitative chemical analysis. Unfortunately, one thing that it will be unable to do is maintain its competitive edge in the 21st century.