Electrodeposition of TiO_2 Using Ionic Liquids

摘要

We report on the electrodeposition of TiO_2 upon transparent conducting oxide (ITO) by using a milder electrochemical bath based on room-temperature ionic liquids (1-ethyl-3-methyl imidazolium-bis(trifluoromethylsulfonyl)imide)) and titanium butoxide as a soluble precursor. By taking advantage of oxygen reduction which proceeds about 500 mV before titanium +IV reduction, well-crystallized thin films of anatase TiO_2 are tailored under potentiostatic control at - 1.5 V (vs. AgCl/Ag) / 100°C followed by a rapid post-annealing treatment at 500°C in air.