Solid-state nanopore devices hold great promise for the rapid characterization of biomolecules. Here we present a simple technique that can efficiently and flexibly fabricate a large number of solid-state nanopore arrays and nanotrenches with hourglass-like inner morphology at low cost based on the step coverage feature of PECVD (plasma enhanced chemical vapor deposition). Nanopores with dimensions of 19 nm x 45 nm and nanotrenches as small as 7 nm were successfully fabricated. These results show that this technique has the potential to fabricate uniform nanopore arrays with hourglass-like inner morphology in mass production, which can be applied to the parallel analysis of biomolecules. (C) 2016 The Electrochemical Society. All rights reserved.
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机译：固态纳米孔器件对生物分子的快速表征具有广阔的前景。在这里，我们介绍一种简单的技术，该技术可以基于PECVD（等离子体增强化学气相沉积）的阶梯覆盖功能，以低成本高效，灵活地制造出大量具有沙漏状内部形态的固态纳米孔阵列和纳米沟槽。成功制造了尺寸为19 nm x 45 nm的纳米孔和小至7 nm的纳米沟槽。这些结果表明，该技术具有批量生产具有沙漏状内部形态的均匀纳米孔阵列的潜力，可用于生物分子的平行分析。 （C）2016年电化学学会。版权所有。
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