Thermopiezoelectric response of a piezoelectric thin film PZT-6B deposited on MgO(100) substrate due to a continuous laser

摘要

Laser irradiation of piezoelectric thin film produces a heating effect due to the absorption of light energy. In this paper, a theoretical model is proposed to study thermopiezoelectric response of piezoelectric thin film. The transient heat transfer equation with two-dimensional composite media is analytically solved by employing integral transform technique. The thermopiezoelectric problem of piezoelectric thin film induced by laser beam is studied by means of potential function method. In this case, the fields of stress, displacement and electric displacement are analytically obtained and the general analytical solutions in quasi-static are written by a double series with dimensionless of formulation. The numerical results of thermopiezoelectric fields for a piezoelectric thin film PZT-6B deposited on MgO(100) substrate induced by Gaussian or doughnut laser beam are obtained and the results are discussed. The calculated results show that temperature field is determined by the characteristic beam radius d and the maximum incident flux for Gaussian source q(0). The radial and circumferential stresses in the thin film PZT-6B are tensile and much larger than normal (compressive) and shear stresses. The Gaussian laser beam heating will produce higher radial and circumferential stresses, however, the doughnut source will produce higher normal and shear stresses. The horizontal electric displacement in the thin film is much larger than the vertical electric displacement. (C) 2002 Elsevier Science Ltd. All rights reserved. [References: 33]