Thermal Characterization and Experimental Investigation of High Temperature Microtubular Heaters

摘要

Raman spectroscopy is a spectroscopic technique based on inelastic scattering of monochromatic light, usually from a laser source. Surface-enhanced Raman scattering (SERS) combines modern laser spectroscopy with the exciting optical properties of metallic structures, resulting in strongly increased Raman signals when molecules are attached to micrometer-sized structures. Micro tubular coil heaters have been widely investigated because of their extensive applications in Microsystems. These are presently manufactured by using Nichrome, a commercial alloy suitable for all types of macro/micro tubular heaters, but can be used for relatively low temperature applications. This paper aims in determining a micro tubular coil heater material suitable for medium and high temperature applications. The material characterization was performed using Raman spectrometer and the geometric optimization for the micro tubular coil heater was performed by using COMSOL Multiphysics software. The characteristic dimensions of the micro tubular coil heater are varied and the results are discussed and compared to each other. The result of temperature distribution of 2-Dimensional thermal analysis is applied to thermal stress analysis, enabling analysis of the time dependent thermal stress of Nichrome, Titanium nitride and Aluminium Nitride micro tubular coil heaters.