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Structural study of lanthanum nickelate thin films deposited on different single crystal substrates

机译:沉积在不同单晶衬底上的镍酸镧薄膜的结构研究

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Fabrications of La2NiO4+delta thin film layers by liquid-injection metalorganic chemical vapor deposition were tried on different single crystals substrates: (001)Si, (001)MgO, (001)LaAlO3 and (001)SrTiO3. As results of structural characterizations, polycrystalline dendritic layers of La2NiO4+delta tetragonal (or orthorhombic) phase were observed on (001)Si substrates while layers of a perovskite-like cubic structure were observed on the other single crystal substrates. From a high-resolution TEM study of a layer deposited on (001)MgO, such a perovskite-like cubic structure exhibits many planar structural faults likely similar to planes of oxygen vacancies of the La(2)Nio(4+delta) orthorhombic structure. A thin intermediate epitaxial layer of NiO phase was also identified. Using a X-ray texture diffractometer, the layer structure on (001)MgO, (001)LaAlO3 and (001)SrTiO3 was confirmed to be of cubic structure with <100> axes parallel to those of the substrate. The T dependence of the resistivity of a layer deposited on (001)MgO substrate was found to be of a semi-conducting behavior. (C) 2004 Elsevier Inc. All rights reserved.
机译:尝试通过液体注入金属有机化学气相沉积法在不同的单晶衬底上制备La2NiO4 +δ薄膜层:(001)Si,(001)MgO,(001)LaAlO3和(001)SrTiO3。作为结构表征的结果,在(001)Si衬底上观察到La 2 NiO 4 +δ四方(或正交)相的多晶树枝状层,而在其他单晶衬底上观察到钙钛矿状立方结构的层。通过对(001)MgO上沉积的层进行的高分辨率TEM研究,这样的钙钛矿样立方结构显示出许多平面结构缺陷,这些缺陷可能类似于La(2)Nio(4 + delta)正交晶结构的氧空位平面。 。还确定了一个薄的NiO相中间外延层。使用X射线织构衍射仪,证实在(001)MgO,(001)LaAlO3和(001)SrTiO3上的层结构为平行于<100>轴的立方结构。发现沉积在(001)MgO衬底上的层的电阻率的T依赖性是半导体行为。 (C)2004 Elsevier Inc.保留所有权利。

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