首页> 外文期刊>International Journal of Refractory Metals & Hard Materials >Topographical analysis by 3-D profilometry in the study of the oxidation of Cr-N coated hard metal tools
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Topographical analysis by 3-D profilometry in the study of the oxidation of Cr-N coated hard metal tools

机译:通过3-D轮廓测量法进行形貌分析,以研究Cr-N涂层硬质金属工具的氧化

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摘要

Conventionally oxidation studies involve thermogravimetric analysis, in which the weight gain is related to the oxide formation. In this work, the oxidation of 4 nm and 7 mu m Cr-N coated hard metal tools was monitored using the 3-D profilometry, in conjunction with XRD, EDS and SEM analyses. For oxidation tests at 850 deg C in air, a higher weight gain was observed for 4 mu m Cr-N system. After oxidation, XRD detected chromium and tungsten oxides for the thinner film system, whereas only chromium oxide was observed for the other. Nevertheless, SEM and EDS results indicated that Cr and W oxides exist on both systems. During oxidation process, besides the outward diffusion of Cr and a probably outward diffusion of substrate elements, such as W, the inward diffusion of oxygen also occurred in some degree through the films, with O_2 reaching the substrate and forming tungsten oxide. This process generated a volumetric expansion, which resulted in local adhesion loss and film rupture. These results indicated that, on coated systems oxidation studies, the weight gain could be not only related with film oxidation, but also with film and substrate oxidation.
机译:常规的氧化研究涉及热重分析,其中重量增加与氧化物的形成有关。在这项工作中,使用3-D轮廓仪结合XRD,EDS和SEM分析监测了4 nm和7μmCr-N涂层硬金属工具的氧化。对于在850摄氏度的空气中进行氧化测试,对于4微米的Cr-N系统,可以观察到更高的重量增加。氧化后,XRD可以检测到较薄的薄膜系统中的氧化铬和氧化钨,而另一个仅检测到氧化铬。然而,SEM和EDS结果表明在两个体系中都存在Cr和W的氧化物。在氧化过程中,除了Cr向外扩散和基材元素(例如W)可能向外扩散外,氧气还通过薄膜在一定程度上发生向内扩散,O_2到达基材并形成氧化钨。该过程产生体积膨胀,这导致局部粘合力损失和膜破裂。这些结果表明,在涂层体系氧化研究中,重量增加不仅与膜氧化有关,而且与膜和基材的氧化有关。

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