Development of a High Precision Coplanar Stage by using Miniature Michelson Interferometer

摘要

The motion control of a high precision coplanar XY-stage is very important to the performance of the nano-positioning control system A prototype micro-coordinate measuring machine (Micro-CMM) has been developed by the authors' group. This system is constructed by a high precision coplanar stage that conforms to Abbe principle, a Z-ram equipped with a touch scan probe and mounted on a pagoda bridge. In this paper, an improved coplanar stage is presented The miniature laser interferometer based on Michelson principle is developed for precise displacement feedback in each axis and the software for the coplanar stage based on BPNN (Back Propagation Neural Network) in association with the PID control has been developed Experiment results show that, calibrated by a commercial laser interferometer, the positioning accuracy is proved within 20 nm with a standard deviation less than 15 nm for the travel length of 20 mm.