Precision Control of a Piezo-Actuated Micro Telemanipulation System

摘要

Piezoelectric actuators are widely used in micro manipulation applications. However hysteresis nonlinearity limits accuracy of these actuators. This paper presents a novel approach for utilizing a piezoelectric nano-stage as slave manipulator of a teleoperation system. The Prandtl-Ishlinskii (PI) model is used to model actuator hysteresis in feedforward scheme to cancel out this nonlinearity. To deal with the influence of parametric uncertainties, unmodeled dynamics, and PI identification error a perturbation term is added to the slave model and apply a sliding mode based impedance control with perturbation estimation. The stability of the entire system is guaranteed by Llewellyn's absolute stability criterion. Performance of the proposed controllers is verified through experiments.