The influence of quaternary electron blocking layer on the performance characteristics of intracavity-contacted oxide-confined InGaN-based vertical cavity surface emitting lasers

摘要

The effect of electron blocking layer (EBL) on the performance characteristics of InGaN-based vertical cavity surface emitting lasers (VCSELs) was numerically investigated using an integrated system engineering technical computer aided design (ISE TCAD) simulation program. Simulation results indicated that the performance characteristics of InGaN quantum well VCSEL were improved by the ternary Al0.17Ga0.83N EBL. Better performance was also obtained when Al0.17Ga0.83N EBL was replaced by a polarization-matched Al0.275In0.115Ga0.61N EBL having the same energy bandgap. The quaternary EBL enhances the output power and differential quantum efficiency (DQE) as well as reduces the threshold current compared with the ternary EBL. Enhancement in the value of the optical intensity was also observed in the VCSEL structure with quaternary EBL. Furthermore, the effect of Al composition of AlInGaN EBL on the performance of InGaN-based VCSEL structure that uses the quaternary AlInGaN EBL was studied. In mole fraction was 0.115, Al mole fraction changed from 0.260 to 0.290 by step 0.005, and optimum performance was achieved in 0.275 Al mole fraction of AlInGaN EBL.