Combinatorial studies of Zn-Al-O and Zn-Sn-O transparent conducting oxide thin films

摘要

In this work, we discuss the development of combinatorial deposition and analysis tools for the investigation of and the optimization of transparent conducting oxides. Library deposition by co-sputtering followed by optical analysis is shown to be a facile way to achieve these goals. Initial work focused on Zn-Al-O libraries with low Al contents as a test case. Subsequent work has focused on the ZnO-SnO2 tie line. Local maxima in the composition dependence of the conductivity were found for Zn/Sn approximate to 2:1 (Zn2SnO4) and Zn/Sn approximate to 1:1 (ZnSnO3). For these two representative stoichiometries, constant composition films have also been grown by pulsed laser deposition. (C) 2002 Elsevier Science B.V. All rights reserved. References: 35