Development Of A MEMS Vibratory Gyroscope Using High-Order Continuous-Time Band-Pass Sigma-Delta Modulator

摘要

This work describes about the design and implementation of a double closed-loop control system for MEMS vibratory gyroscope using sixth-order and eighth-order continuous time band-pass sigma-delta modulator. A gyroscope is a device based on the principles of angular momentum for measuring the orientation. MEMS (Micro-electro-mechanical Systems) refer to devices or systems integrated with electrical and mechanical components in the scale of microns. There are two orthogonal modes: drive and sense mode, and these modes has corresponding control loops. The sense mode is controlled by sixth-order continuous- time force-feedback band-pass sigma-delta modulator. Here we choose the band-pass sigma-delta modulator so that only less sampling frequency is required. The principle of operation is based on Coriolis force, it transfers energy from drive mode to sense mode. By giving the input angular rate, the proof mass displacement and Coriolis force takes place.