Develop A Vibration Based MEMS Piezoelectric Energy Harvester Using Micro Cantilever Beam

摘要

Energy harvester is a self-generating energy source which is able to run small scale electronic devices. It largely reduces the dependency on external power source. This paper represents the utilization of micro cantilever beam to develop a vibration based electromechanical systems (MEMS) piezoelectric energy harvester system. The proposed micro cantilever part has been developed by finite element method (FEM) using COMSOL. The motivation behind this research is to calculate the resonant frequency of the harvesting and electrical voltage behaviour considering cantilever beam length and thickness. The materials (i.e., silicon, PZT-5H) have been studied to improve voltage efficiency. The proposed micro cantilever beam has been able to generate 0.4V in COMSOL. Finally, the result of proposed method is compared with other existing methods to validate the outcomes.