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Background Subtraction Practice in X-ray Reflectivity Reciprocal Space Mapping and Its Influence on the Structural Parameters of Thin Films

机译:X射线反射率互空间映射中的本底扣除实践及其对薄膜结构参数的影响

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摘要

Background subtraction practice in X-ray reflectivity reciprocal space mapping (XRRSM) is described and compared to the traditional specular reflectivity. XRRSM allows determining a more precise contribution of background to the reflectivity signal which manifests itself in an improvement of the resolution of interference fringes. Data analysis and influence of background subtraction determined by two methods on the structural parameters of thin film are discussed using simulated X-ray reflectivity.
机译:描述了X射线反射率倒数空间映射(XRRSM)中的背景减法实践,并将其与传统的镜面反射率进行了比较。 XRRSM可以确定背景对反射率信号的更精确贡献,这可以通过改善干涉条纹的分辨率来体现。利用模拟的X射线反射率讨论了两种方法确定的数据分析和背景扣除对薄膜结构参数的影响。

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