A gas-discharge plasma source for the modification of the potential on the surface of an insulator

摘要

A gas-discharge source of low-temperature plasma with the charged particle concentration of 10{sup}11 - 10{sup}13 m{sup}(-3) is described. The operating characteristics of the source are considered. Experiments showed that the developed plasma source can be effectively used for the soft (without breakdowns) neutralization of both surface and bulk excess charge accumulated by insulating materials.