Hysteresis Property of Tip-Tilt-Piston Micromirror Based on Tilt-and-Lateral Shift-Free Piezoelectric Unimorph Actuator

摘要

This paper presents hysteresis property of tip-tilt-piston micromirror based on tilt-and-lateral shift-free piezoelectric unimorph actuator. The accuracy and the level of performance of piezoelectric actuator will be reduced for the reason of hysteresis behavior of piezoelectric device. To compensate the hysteresis behavior of the actuator, the properties should be researched and tested at first. The paper report the hysteresis behavior of micromirror with TLSF piezoelectric actuator under fixed frequency driving is stable with respect to the changes of the time and amplitude of driving voltage without considering the failure effect.