Effect of Annealing on Ferroelectric Properties of Lanthanum Modified Lead Zirconate Titanate Thin Films

摘要

Thin films of lanthanum modified lead zirconate titanate with chemical formula (Pb_(0.95)La_(0.05)Zr_(0.54)Ti_(0.46)O_3 ) were prepared using spin coating method. The sol for the PLZT was prepared in house by metal organic decomposition (MOD) technique. The prepared films were annealed in the temperature range of 550-750° C in a rapid annealing furnace in flowing oxygen to promote crystallinity in the films. Effect of post deposition annealing temperatures on the structure/morphology and ferroelectric properties of the films were examined using X-ray diffraction, atomic force microscopy and ferroelectric tester.