The ion microbeam facility of Florence: A versatile instrument for the analysis and modification of materials

摘要

A brief description of the relevant features of the external scan-ning ion microbeam facility installed at the 3 MV tandem accelerator in Florence is here reported. With our facility we can work in "external" set-up (the target is kept in atmosphere) with a beam spot size on sample better than 10 μm. The Ion Beam Analyses (IBA) detection set-up of our microbeam allows us to exploit simultaneously PIXE (Particle-Induced X-ray Emission), PIGE (Particle-Induced y-ray Emission). BS (Backscattering Spectrometry) and MIL (Ion-Beam-Induced Luminescence) techniques; in combination with a scanning system, it is thus pos-sible to fully characterize samples, through the collection of 2D maps of structural and elemental information. Finally, an activity recently started at the microbeam of Florence with regards to the ion modification of diamond is reported.