Cross-coupling controller for five degree-of-freedom coplanar nanostage

摘要

The proposed approach is to design a tracking controller for five degree-of-freedom coplanar nanostage which can provide high precision applications. The hysteresis and creep effects are the piezoelectric actuated platform provided nonlinear behavior. This study proposed a viscoelastic creep model. It was modeled as a series connection of springs and dampers to describe the creep effect. Then, utilize a PI controller using Taguchi method to search the optimization parameters to suppress the tracking error. Finally, a cross-coupling control scheme is proposed to eliminate the contour error which is typical in dual-axes tracking control problem. The developed approaches are numerically and experimentally verified which demonstrate performance and applicability of the proposed designs under a variety of operating conditions.