Retrieval of a Wave Front with Small Deformations from a Sample of Interferograms with a Variable Number and Orientation of Interference Fringes

摘要

A new approach to phase retrieval from an interferogram through the application of the classical fringe tracing method to a sample in which interference fringes change their number and orientation is pro-posed. Wave fronts retrieved from individual interferograms are averaged, and the quality of the studied sur-face is judged by the estimate found. Phase averaging over several interferograms allows a decrease in the error variance for the retrieved phase, caused not only by random noise, but also nonuniformity of the aperture cov-ering by interference fringes and light source heterogeneity. Results of model experiments carried out show prospects for interferometry in the nanometrology of high-quality optical components.