PHASE CONNECTING METHOD FOR WAVE FRONTS BY FRINGE SCANNING INTERFERENCE MEASURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a method for performing a phase connection by a simple process.;SOLUTION: First, extraction of a segment is performed in step S1. The phase connection in each of the segments is then performed in step S2. This method is the same as the conventional well known method. Detection of an aggregate of the segments is then performed in step S3. Thus, the aggregate of the segments is determined, and the phase connection between the segments in the aggregate is performed in step S4.;COPYRIGHT: (C)2005,JPO&NCIPI