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Method for designing error-compensating phase-calculation algorithms for phase-shifting interferometry

机译:用于相移干涉术的误差补偿相位计算算法的设计方法

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We propose a general approach to eliminating some error source effects in phase-calculation algorithms for phase-shifting interferometry. We express the actual phase shift in a convenient form that takes the errors into account and develop in series the detected phase from a generic algorithm. Setting to zero the terms of the series that involve unwanted errors leads to a set of linear equations for the algorithm coefficients, which can thus be found. By using this approach, one could develop an algorithm series for an individual interferometer based on relevant concerns about the main error sources in it and eliminate the error source effects to any desired order. Two examples of algorithm series, to eliminate distorted phase shifts caused by the geometric effect in an interferometer with a spherical Fizeau cavity and to eliminate vibration effects, are discussed.
机译:我们提出了一种通用方法来消除相移干涉术的相位计算算法中的某些误差源效应。我们以方便的形式表达实际的相移,该相移考虑了误差,并通过通用算法串联开发检测到的相位。将涉及不想要的误差的级数项设置为零会导致算法系数的线性方程组,因此可以找到。通过使用这种方法,可以基于对其中的主要误差源的相关关注,为单个干涉仪开发算法系列,并将误差源影响消除到任何所需的顺序。讨论了算法系列的两个示例,以消除具有球形Fizeau腔的干涉仪中由几何效应引起的畸变相移并消除振动效应。

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