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Strategic development perspectives of laser processing on polycrystalline silicon surface

机译:多晶硅表面激光加工的战略发展前景

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Purpose: The goal of this paper is to evaluate the strategic perspectives of polycrystalline silicon texturisation according to custom foresight methodology. The texturing type was the technology division criterion. Thus, in the paper three technologies, as following: polycrystalline silicon texturisation by alkaline etching, laser treatment and laser treatment with chemical etching were compared. Design/methodology/approach: In the framework of the foresight-materials science research, a foresight matrices set was prepared, the strategic development tracks were determined, as well as materials science experiments using a Nd:YAG laser, a scanning electron microscope, a confocal laser scanning microscope and a spectrophotometer were conducted. Finally, on the basis of the obtained results the technology roadmaps were prepared. Findings: The carried out research pointed out the industrial importance of polycrystalline silicon texturisation and good perspectives for these technology groups. Research limitations/implications: Research concerning polycrystalline silicon texturisation constitute a part of a larger research project aimed at identifying, researching, and characterising the priority innovative technologies in the field of materials surface engineering. Practical implications: The presented results of experimental materials science research were proved the significant positive impact of texturisation on the structure and mechanical properties of polycrystalline silicon surface layers, which leads to the justification of their including into the set of priority innovative technologies recommended for application in industrial practice. Originality/value: The novelty of this paper is to evaluate the value of polycrystalline silicon texturisation in the background environment with their future development perspectives determination.
机译:目的:本文的目的是根据定制的预见方法评估多晶硅织构化的战略前景。纹理类型是技术划分标准。因此,在本文中,对以下三种技术进行了比较:通过碱性蚀刻对多晶硅进行织构化,激光处理和化学蚀刻进行激光处理。设计/方法/方法:在预见材料科学研究的框架内,准备了一个预见矩阵集,确定了战略发展轨迹,并使用Nd:YAG激光,扫描电子显微镜,共聚焦激光扫描显微镜和分光光度计。最后,根据获得的结果,准备了技术路线图。发现:进行的研究指出了多晶硅组织化的工业重要性,并为这些技术组提供了良好的前景。研究的局限性/意义:有关多晶硅组织的研究是一个较大的研究项目的一部分,该项目旨在识别,研究和表征材料表面工程领域的优先创新技术。实际意义:实验材料科学研究的结果证明了织构化对多晶硅表面层的结构和力学性能的显着积极影响,从而证明了将其纳入推荐用于半导体领域的优先创新技术的合理性工业实践。独创性/价值:本文的新颖性在于用其未来的发展前景来评估多晶硅在背景环境中的纹理化价值。

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