Nanoprobe arrays for multiple single cell insertion using heterogeneous nanosphere lithography (HNSL)

摘要

Nanoprobe arrays for multiple single cell insertion were developed using heterogeneous nanosphere lithography. Using two heterogeneous nanopartides as sacrificial and masking particles, high aspect ratio Si nanoprobes were fabricated in an array with spacing between the nanoprobes ranging from a few to tensof micrometers. For registered single cell analysis, multiple and precise insertion of nanoprobes into multiple single cells in a parallel fashion was demonstrated using micropipette suction and micromanipulators.