Growth and nanomechanical characterization of nanoscale 3D architectures grown via focused electron beam induced deposition

摘要

Nanomechanical measurements of platinum-carbon 3D nanoscale architectures grown via focused electron beam induced deposition (FEBID) were performed using a nanoindentation system in a scanning electron microscope (SEM) for simultaneous in situ imaging. Compression tests were used to estimate the modulus of the platinum-carbon deposits to be in the range of 8.6-10.5 GPa. Cantilever arm bend tests resulted in a modulus estimation of 15.6 GPa. Atomic layer deposition was used to conformally coat FEBID structures with a thin film of Al2O3, which strengthened the structures and increased the measured modulus. Cycled load-displacement testing at various load rates of nano-truss structures was also performed, demonstrating a viscoelastic response in the FEBID material. Finally, load-displacement tests of a variety of 3-dimensional nanoarchitectures with and without Al2O3 coatings were measured.