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首页> 外文期刊>Acta Physica Slovaca >New dispersion model of the optical constants of the DLC films
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New dispersion model of the optical constants of the DLC films

机译:DLC薄膜光学常数的新色散模型

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In this paper a new dispersion model of the optical constants of amorphous solids enabled us to perform an efficient parameterization of the optical constants of diamond like carbon (DLC) thin films. The model was based on the mathematical modeling of the density of electronic states (DOS) corresponding to both the valence and conduction bands. Moreover, the existence of the σ and π electronic states was taken into account, i.e. two valence and two conduction bands were supposed. The imaginary and real parts of the dielectric function were then calculated by the numerical convolution of the DOS and using a corresponding Kramers-Kronig relation, respectively. According to the model the DOS as well as the optical constants were calculated from ellipsometric measurements in the range 240-830 nm and estimated even outside this range. From the parameters of the model we evaluated also the ratio of π- to-σ electrons and consequently the sp~3-to-sp~2 ratio using a known hydrogen atomic fraction. The optical constants of DLC films with addition of SiO_x were determined and compared with DLC too.
机译:在本文中,非晶固体光学常数的新色散模型使我们能够对类金刚石碳(DLC)薄膜的光学常数进行有效的参数化。该模型基于对应于价带和导带的电子态密度(DOS)的数学建模。此外,考虑到存在σ和π电子态,即假定两个价态和两个导带。然后分别通过DOS的数值卷积并使用相应的Kramers-Kronig关系来计算介电函数的虚部和实部。根据该模型,可以通过椭偏测量在240-830 nm范围内计算DOS以及光学常数,甚至可以在该范围之外进行估算。从模型的参数中,我们还使用已知的氢原子分数评估了π电子与σ电子的比率,从而评估了sp〜3与sp〜2的比率。确定了添加了SiO_x的DLC薄膜的光学常数,并将其与DLC进行了比较。

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