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机译:通过组合激光聚焦原子沉积和X射线干扰光刻制造的一种新型的纳米级参考光栅及其用于校准扫描电子显微镜的用途
Tongji Univ Sch Phys Sci &
Engn Shanghai Peoples R China;
Phys Tech Bundesanstalt D-38116 Braunschweig Germany;
Tongji Univ Sch Phys Sci &
Engn Shanghai Peoples R China;
Phys Tech Bundesanstalt D-38116 Braunschweig Germany;
Phys Tech Bundesanstalt D-38116 Braunschweig Germany;
Chinese Acad Sci Shanghai Adv Res Inst Shanghai Peoples R China;
Chinese Acad Sci Shanghai Adv Res Inst Shanghai Peoples R China;
Shanghai Inst Measurement &
Testing Technol Shanghai Peoples R China;
Shanghai Inst Measurement &
Testing Technol Shanghai Peoples R China;
Tongji Univ Sch Phys Sci &
Engn Shanghai Peoples R China;
Tongji Univ Sch Phys Sci &
Engn Shanghai Peoples R China;
Scanning electron microscopy; Lateral standards; Calibration; Magnification; Field distortion; Metrological atomic force microscopy;
机译:激光聚焦原子沉积和极端紫外线干扰光刻方法的混合应用,用于制造自适应纳米瘤
机译:用扫描电子显微镜法测量溶质 - 溶剂分离软光刻光栅测量高温变形
机译:在扫描电子显微镜中通过原子力显微镜原位监测电子束诱导的沉积
机译:用原子光刻制造的自追踪铬光栅校准原子力显微镜的新方法
机译:纳米球光刻:角分辨沉积,磁性纳米颗粒和扫描探针拉曼显微镜
机译:激光聚焦原子沉积制备的纳米间距标准品的准确性
机译:低加速电压扫描传输电子显微镜:纳米级上的成像,衍射,X射线微分析和电子能损光谱
机译:扫描探针光刻。 2.选择性化学气相沉积铜到扫描隧道显微镜定义模式。