Experimental investigation of the electromagnetic effect and improvement of the plasma radial uniformity in a large-area, very-high frequency capacitive argon discharge

摘要

We performed an experimental investigation on the electromagnetic effect and the plasma radial uniformity in a larger-area, cylindrical capacitively coupled plasma reactor. By utilizing a floating hairpin probe, dependences of the plasma radial density on the driving frequency and the radio-frequency power over a wide pressure range of 5-40 Pa were presented. At a relatively low frequency (LF, e.g. 27 MHz), an evident peak generally appears near the electrode edge for all pressures investigated here due to the edge field effect, while at a very high frequency (VHF, e.g. 60 or 100 MHz), the plasma density shows a sharp peak at the discharge center at lower pressures, indicating a strong standing wave effect. As the RF power increases, the center-peak structure of plasma density becomes more evident. With increasing the pressure, the standing wave effect is gradually overwhelmed by the 'stop band' effect, resulting in a transition in the plasma density profile from a central peak to an edge peak. To improve the plasma radial uniformity, a LF source is introduced into the VHF plasma by balancing the standing wave effect with the edge effect. A much better plasma uniformity can be obtained if one chooses appropriate LF powers, pressures and other corresponding discharge parameters.