Highly Conducting and Highly Transparent Oxide/Metal/Oxide Structures for Ultraviolet-C Light Sources Utilizing a Thin Cu Wetting Interlayer

摘要

The Zn0.8-xMg0.2BexO/Cu/Ag/Zn0.8-xMg0.2BexO multilayer structures were designed, sputter-deposited at room temperature, and characterized in detail. Results indicated that the multilayer structures with high transmission (higher than 90% at the visual wavelength range) can be readily obtained by simply inserting a thin (similar to 5 nm) Cu wetting layer, which renders the thin Ag layers (similar to 5 nm thick) continuous and smooth. It was also observed that the optical absorption edges of the multilayer structures increase as the energy band-gaps of the top/bottom oxide layers increase and the multilayer structures with the energy band gap of similar to 6.0 eV can be obtained by employing the ZnMgBeO layers, with an excellent resistivity of similar to 1.7 x 10(-4) Omega cm. These results represent a significant improvement over the previous reports and the first report on the design and fabrication of the highly conducting transparent materials for the UV-C application