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Electron beam assisted physical vapor deposition of very hard TiCN coating with nanoscale characters

机译:电子束用纳米级特征辅助非常硬的TiCN涂层的物理气相沉积

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摘要

The work concerns electron beam assisted physical vapor deposition (EB-PVD) of titanium carbo-nitride (TiCN) on D2 tool steel. First, D2 steel substrate was heat treated to support and improve the load bearing capacity of the coating. To reduce the intrinsic gap between D2 substrate and TiCN coating and to improve the adhesive strength of the coating, a thin bond coat of Ti was EB-PV deposited on D2 steel prior to TiCN coating. The deposited coating was characterized in depth using XRD, SEM, AFM, profilometry and nanoindentation; its performance was assessed by the wear tests. The results demonstrated that EB-PVD process is successful in uniform deposition of nanograined (5.7 nm) TiCN coating; this character of the coating enhances its mechanical responses and cohesive strength. AFM topographic characterization confirms nanoscale smoothness of the TiCN coating which is a key factor in upgrading the wear resistance and tribological behavior of the coating. Nanoindentation results showed that the deposited coating is very hard; it is also tough enough. The hardness of the TiCN in this work is too much higher than those reported in the literature by similar works. AFM and nanoindentation results showed that a TiCN coating with thickness of 1.6 mu m and roughness of 22 nm exhibits a hardness of 3552 HV which is much higher than those hardnesses reported in previous works. The wear tests showed that the deposited TiCN coating has a higher wear resistance than the D2 steel as well as TiN coating; this better performance is attributed to the modifications made in the coating process and its nanoscale characters.
机译:该工作涉及D2工具钢上的钛碳氮化物(TiCN)的电子束辅助物理气相沉积(EB-PVD)。首先,将D2钢基板热处理以支撑和改善涂层的承载能力。为了减少D2基板和TiCN涂层之间的内在间隙并改善涂层的粘合强度,在TICN涂层之前沉积在D2钢上的eB-PV薄粘合涂层。使用XRD,SEM,AFM,轮廓测定和纳米凸缘进行深度深入表征沉积的涂层;它的性能是通过磨损测试评估的。结果表明,EB-PVD工艺成功地成均匀沉积纳米(5.7nm)TiCN涂层;该涂料的这种特性增强了其机械反应和粘性强度。 AFM地形表征证实了TICN涂层的纳米级平滑度,这是提高涂层耐磨性和摩擦学行为的关键因素。纳米内狭窄的结果表明,沉积的涂层非常难;这也足够坚韧。在这项工作中的TICN的硬度太高于通过类似作品在文献中报告的工作。 AFM和纳米endentation结果表明,厚度为1.6μm和22nm的粗糙度的TiCn涂层表现出3552 HV的硬度,远高于先前作品中报告的硬度。磨损试验表明,沉积的TiCN涂层具有比D2钢以及锡涂层更高的耐磨性;这种更好的性能归因于涂层过程和其纳米级字符中的修改。

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