A technological experiment is proposed to establish physical and chemical processes providing chemical hydrodynamic non-contact polishing crystal surface. To describe the processes a balance equation of diffusion, convective and active components of etching fluxes is used. An analytical expression of a relationship between a shape of the surface of the treated material and physical parameters of the processes is obtained. It was established that a macrorelief of the treated surface depends only on a speed of relative moving of the pad and a treated specimen, a distance between the pad and the specimen and a diffusion coefficient of active component in etching solution. Therefore, the shape of the treated surface does not depend on the treated material concentration of active components and a constant of chemical reaction. A good agreement the calculated processes and experimental ones was achieved.
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