A 470 μA direct readout circuit for electret and MEMS digital microphones

摘要

A direct readout circuit configurable for electret or MEMS digital microphones is presented. The circuit includes a transducer buffer, a programmable preamplifier, a ΣΔ modulator, a bandgap reference, a clock detection circuit, and a stability recovery system. The prototype achieves a signal-to-noise-and distortion of 63 dB A-weighted at 1 Pa sound level with a consumption of 470 μA at 1.8 V supply voltage. The active area is 0.72 mm~2 in a 0.25 μm CMOS process with MIM capacitor option.