Preparation and Magnetic Properties of Co-Pd-Mn-O Soft Magnetic Films by the Reactive Deposition Method Using an O_2 Molecular Beam

摘要

Co-Pd-Mn-O granular soft magnetic films withhigh electrical resistivity were successfully prepared by thereactive deposition method using an O_2 molecular beamfollowed by magnetic field annealing. The films with good softmagnetic properties show H_c of approx 0. 3 Oe, 4#pi#M_s ofapprox 7400 G, a uniaxial anisotropy field of approx l20 Oe,and resistivity of approx 200 #mu##OMEGA#cm. Such filmswere found to be composed of oxides of Mn and fcc Co-Pdgranules with a particle size of approx 1.5 nm.