Prototype of a nanoindentation instrument with an optical fiber interferometer

摘要

A prototype of a nanoindetation instrument with an optical fiber interferometer has been developed. The instrument is designed for future installation in a scanning electron microscope. The instrument consists of a specially designed load cell, an optical fiber interferometer and piezoelectric actuators. Resolution of the load cell and the interferometer were 100μN and 0.1 nm respectively. The load frame compliance of the instrument was estimated as 3.36 nm/mN with a standard hardness block of 400 HV. The measured hardness values for a standard hardness block of 900 HV were well agreed with the results measured by using UMIS-2000 in another report.