PM removal technologies using novel two-stage electrostatic precipitators developed by Korea Institute of Machinery and Materials

摘要

A novel two-stage electrostatic precipitator (ESP) with multiple ion injection type chargers and parallel collection plates was developed and shown to efficiently collect particles from the corrosive waste gas discharged from semiconductor and optoelectronic processes. Carbon brush ionizers for the generation of ions were located outside of the main gas flow, but the injection of clean air and induced voltage between the outer and inner plates of the charging stage carried ions into the main gas flow; thus, gases and particles in the main flow did not corrode or contaminate the charger The particle collection performance of the ESP was evaluated experimentally for 0.3 μm particles, PM (Particular matter) 1, and PM 2.5 by varying main gas flow rate. The novel ESP achieved particle collection efficiencies of 89.5% and 99.5% at the best condition when the voltage was applied to only the charging stage and to both the charging and collection stages, respectively.