Solid-state bonding of silicon carbide-ceramics to metal using Cr and Ni double layer plate Mo plate

摘要

The SIC ceramics were joined to kovar-alloy using a Cr and Ni double layer plated Mo plate. The Cr and Ni double layer plated Mo plate was annealed at 1373K before joining. The joining was performed between 1273K and 1473K in a dynamic vacuum atmosphere. The structure and composition of the reaction layers were investigated by scanning electron microscopy, electron-probe microanalysis, and X-ray diffraction analysis. Joining strengths were measured by the 4-point bending test. Reaction layers were composed of a chromium-carbon(Cr{sub}3C{sub}2, Cr{sub}23C{sub}6), chromium-silicon (Cr{sub}3Si), nickel-silicon(Ni{sub}2Si), and chromium-silicon-carbon(Cr{sub}(5-x)Si{sub}(3-z)C{sub}(x+z)) compound layer between ceramics surface and the Ni-Cr alloy layers. Fracture strength of SIC/K6var-alloy couples showed the maximum of 250 MPa at room temperature.